JPH0221759U - - Google Patents
Info
- Publication number
- JPH0221759U JPH0221759U JP10044888U JP10044888U JPH0221759U JP H0221759 U JPH0221759 U JP H0221759U JP 10044888 U JP10044888 U JP 10044888U JP 10044888 U JP10044888 U JP 10044888U JP H0221759 U JPH0221759 U JP H0221759U
- Authority
- JP
- Japan
- Prior art keywords
- fixed part
- resistor
- strain
- crystal
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10044888U JPH0221759U (en]) | 1988-07-28 | 1988-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10044888U JPH0221759U (en]) | 1988-07-28 | 1988-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221759U true JPH0221759U (en]) | 1990-02-14 |
Family
ID=31328528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10044888U Pending JPH0221759U (en]) | 1988-07-28 | 1988-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221759U (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5972775A (ja) * | 1982-10-20 | 1984-04-24 | Hitachi Ltd | シリコン歪ゲ−ジ式感圧装置およびその製造方法 |
| JPS59217374A (ja) * | 1983-05-26 | 1984-12-07 | Toyota Central Res & Dev Lab Inc | 半導体ひずみ変換器 |
| JPS61212740A (ja) * | 1985-03-18 | 1986-09-20 | Yokogawa Electric Corp | 半導体圧力変換器 |
-
1988
- 1988-07-28 JP JP10044888U patent/JPH0221759U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5972775A (ja) * | 1982-10-20 | 1984-04-24 | Hitachi Ltd | シリコン歪ゲ−ジ式感圧装置およびその製造方法 |
| JPS59217374A (ja) * | 1983-05-26 | 1984-12-07 | Toyota Central Res & Dev Lab Inc | 半導体ひずみ変換器 |
| JPS61212740A (ja) * | 1985-03-18 | 1986-09-20 | Yokogawa Electric Corp | 半導体圧力変換器 |